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Prof. Francesca Iacopi , University of Technology Sydney, Faculty of Engineering and IT

IEEE Distinguished Lecture: Graphene on cubic silicon carbide: integrated functionalities on silicon

22.06.2023 (Thursday) , 13:00 - 14:00
Werner-Hartmann-Bau, Room 205/206 , Nöthnitzer Str. 66 , 01187 Dresden

Harnessing graphene’s properties on a silicon platform could deliver a broad range of novel miniaturized and in-situ reconfigurable functionalities. We will review the learnings from the development of our epitaxial graphene on silicon carbide on silicon technology and some of its most promising applications. This platform allows to obtain any complex graphene -coated silicon carbide 3D nanostructures in a site – selective fashion at the wafer -scale and with sufficient adhesion for integration [1, 2]. Key capabilities for nano-optics and metasurfaces in the MIR are specifically unlocked by the graphene/silicon carbide combination [3].

We have recently demonstrated that the sheet resistance of epitaxial graphene on 3C-SiC on silicon is comparable to that of epitaxial graphene on SiC wafers, despite substantially smaller grains. We also indicate that the control of the graphene interfaces, particularly when integrated, can be a more important factor than achieving large grain sizes [4]. In addition, we show that well- engineered defects in graphene are preferable to defect -free graphene for most electrochemical applications, including biosensing. Promising examples of application of this technology in the More- than -Moore domain include integrated energy storage [5], MIR sensing and detection [6], and sensors for electro-encephalography [7, 8] for brain-computer interfaces [9].

[1] B.Cunning et al, Nanotechnology 25 (32), 325301, 2014
[2] F.Iacopi et al, Journal of Materials Research 30 (5), 609-616, 2015
[3] P.Rufangura e al, Journal of Physics: Materials 3 (3), 032005, 2020 [4] A.Pradeepkumar et al, ACS Applied Nano Materials 3 (1), 830-841, 2019 [5] M.Amjadipour, D.Su and F.Iacopi, Batteries & Supercaps 3 (7), 587-595, 2020 [6] P.Rufangura et al, Nanomaterials 11 (9), 2339, 2021 [7] S.Faisal et al, Journal of Neural Engineering 18 (6), 066035, 2021 [8] S.Faisal et al, ACS Appl. Nano Mater. 5, 8, 10137–10150, 2022 [9] F.Iacopi and CT Lin, Progress in Biomedical Eng. 2022, doi.org/10.1088/2516-1091/ac993d.

Professor Francesca Iacopi has over 20 years’ industrial and academic research expertise in semiconductor technologies, with 160 peer-reviewed publications and 10 granted US patents, spanning interconnects, CMOS devices and packaging. Her research focuses on the translation of basic scientific advances in nanomaterials and novel device concepts into implementable integrated technologies. She is known for her seminal work on the integration of porous dielectrics in on-chip interconnects, and for the invention of the alloy -mediated epitaxial graphene platform on SiC/Si pseudo-substrates. She was recipient of an MRS Gold Graduate Student Award (2003), an Australian Research Council Future Fellowship (2012), and a Global Innovation Award in Washington DC (2014) and was listed among the most innovative engineers by Engineers Australia (2018).  Francesca is a Fellow of the Institution of Engineers Australia, an IEEE EDS Distinguished Lecturer and serves regularly in technical and strategic committees for IEEE and the Materials Research Society. She is an Elected Member to the IEEE EDS Board of Governors (2021) and serves in the Editorial Advisory Board for ACS Applied Nanomaterials, the Journal of Electronic Materials (Springer), and the IEEE The Institute magazine. She leads the Integrated Nanosystems Lab, in the Faculty of Engineering and IT, University of Technology Sydney. She is an Associate Investigator of the Centre of Excellence in Low-Energy Electronics Technologies (FLEET) and a Chief Investigator of the CoE in Transformative Meta-Optical Systems (TMOS), funded by the Australian Research Council.

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