MAM 2017 - Materials for Advanced Metallization
26.03.2017 (Sunday) - 29.03.2017 (Wednesday)
, 18:00 - 14:00
Hilton Hotel Dresden , An der Frauenkirche 5 , 01067 Dresden
Starting with refractory metals and silicides in the 80's, moving to materials for advanced metallization in 1995, the MAM addresses new and challenging topics in the field of BEOL solutions, novelties in alternative interconnect systems and more widely advanced materials and structures relevant to micro and nano-electronics. Topics include both fundamental and applied research, as well as issues related to introduction into manufacturing. The 2017 conference from March 26 to March 29, 2017 also aims to address new challenges in the fields of Materials for Flexible Electronics, Nanodevices and Process and Device Modelling and Simulation.
This year the main topics are:
- Materials, Processes & Integration
- Deposition PVD; CVD; ALD; ELD; ECD; SAMs, reflow; e-beam
- Advanced Characterization and Modeling techniques
- Applications including nanoscale
The registration is open.
Full information about the conference including program details is available here.