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Antisticking layers on antireflective chromium for hybrid (CNP) nanoimprint molds
Reference
R. Kirchner, B. Adolphi, R. Landgraf, W.-J. Fischer, "Antisticking layers on antireflective chromium for hybrid (CNP) nanoimprint molds", SPIE Proceedings (Uwe F.W. Behringer and Wilhelm Maurer), SPIE, Feb 2010. [doi]
Bibtex
@inproceedings{Kirchner_2010,
doi = {10.1117/12.865572},
url = {https://doi.org/10.1117%2F12.865572},
year = 2010,
month = {feb},
publisher = ,
author = {R. Kirchner and B. Adolphi and R. Landgraf and W.-J. Fischer},
editor = {Uwe F.W. Behringer and Wilhelm Maurer},
title = {Antisticking layers on antireflective chromium for hybrid ({CNP}) nanoimprint molds},
booktitle = {{SPIE} Proceedings}
}
doi = {10.1117/12.865572},
url = {https://doi.org/10.1117%2F12.865572},
year = 2010,
month = {feb},
publisher = ,
author = {R. Kirchner and B. Adolphi and R. Landgraf and W.-J. Fischer},
editor = {Uwe F.W. Behringer and Wilhelm Maurer},
title = {Antisticking layers on antireflective chromium for hybrid ({CNP}) nanoimprint molds},
booktitle = {{SPIE} Proceedings}
}
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