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Atomic layer deposition of yttrium iron garnet thin films
Reference
M. Lammel, D. Scheffler, D. Pohl, P. Swekis, S. Reitzig, S. Piontek, H. Reichlova, R. Schlitz, K. Geishendorf, L. Siegl, B. Rellinghaus, L. M. Eng, K. Nielsch, S. T. B. Goennenwein, A. Thomas, "Atomic layer deposition of yttrium iron garnet thin films", In Physical Review Materials, American Physical Society (APS), vol. 6, no. 4, Apr 2022. [doi]
Bibtex
@article{Lammel_2022,
doi = {10.1103/physrevmaterials.6.044411},
url = {https://doi.org/10.1103%2Fphysrevmaterials.6.044411},
year = 2022,
month = {apr},
publisher = {American Physical Society ({APS})},
volume = {6},
number = {4},
author = {M. Lammel and D. Scheffler and D. Pohl and P. Swekis and S. Reitzig and S. Piontek and H. Reichlova and R. Schlitz and K. Geishendorf and L. Siegl and B. Rellinghaus and L. M. Eng and K. Nielsch and S. T. B. Goennenwein and A. Thomas},
title = {Atomic layer deposition of yttrium iron garnet thin films},
journal = {Physical Review Materials}
}
doi = {10.1103/physrevmaterials.6.044411},
url = {https://doi.org/10.1103%2Fphysrevmaterials.6.044411},
year = 2022,
month = {apr},
publisher = {American Physical Society ({APS})},
volume = {6},
number = {4},
author = {M. Lammel and D. Scheffler and D. Pohl and P. Swekis and S. Reitzig and S. Piontek and H. Reichlova and R. Schlitz and K. Geishendorf and L. Siegl and B. Rellinghaus and L. M. Eng and K. Nielsch and S. T. B. Goennenwein and A. Thomas},
title = {Atomic layer deposition of yttrium iron garnet thin films},
journal = {Physical Review Materials}
}
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