cfaed Publications
On the Control of the Fixed Charge Densities in Al2O3-Based Silicon Surface Passivation Schemes.
Reference
D.K. Simon, P.M. Jordan, T. Mikojajick, I. Dirnstorfer, "On the Control of the Fixed Charge Densities in Al2O3-Based Silicon Surface Passivation Schemes.", In ACS applied materials & interfaces, vol. 7, no. 51, pp. 28215-22, 2015.
Bibtex
@article{DKSimon2015Onthe,
title={On the Control of the Fixed Charge Densities in Al2O3-Based Silicon Surface Passivation Schemes.},
author={D.K. Simon, P.M. Jordan, T. Mikojajick, and I. Dirnstorfer},
journal={ACS applied materials & interfaces},
year={2015},
volume={7},
number={51},
pages={28215-22},
}
title={On the Control of the Fixed Charge Densities in Al2O3-Based Silicon Surface Passivation Schemes.},
author={D.K. Simon, P.M. Jordan, T. Mikojajick, and I. Dirnstorfer},
journal={ACS applied materials & interfaces},
year={2015},
volume={7},
number={51},
pages={28215-22},
}
Downloads
No Downloads available for this publication
Related Paths
Permalink
https://cfaed.tu-dresden.de/publications?pubId=1412