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On the Control of the Fixed Charge Densities in Al2O3-Based Silicon Surface Passivation Schemes.

Reference

P.M. Jordan D.K. Simon, I. Dirnstorfer, "On the Control of the Fixed Charge Densities in Al2O3-Based Silicon Surface Passivation Schemes." , In ACS applied materials & interfaces, vol. 7, no. 51, pp. 28215-22, 2015.

Bibtex

@article{DKSimon2015Onthe,
title={On the Control of the Fixed Charge Densities in Al2O3-Based Silicon Surface Passivation Schemes.},
author={D.K. Simon, P.M. Jordan, T. Mikojajick, and I. Dirnstorfer},
journal={ACS applied materials & interfaces},
year={2015},
volume={7},
number={51},
pages={28215-22},
}

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