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Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers
Reference
Arne Schleunitz, Vitaliy A Guzenko, Martin Messerschmidt, Hakan Atasoy, Robert Kirchner, Helmut Schift, "Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers", In Nano Convergence, Springer Science and Business Media LLC, vol. 1, no. 1, Feb 2014. [doi]
Bibtex
@article{Schleunitz_2014,
doi = {10.1186/s40580-014-0007-5},
url = {https://doi.org/10.1186%2Fs40580-014-0007-5},
year = 2014,
month = {feb},
publisher = {Springer Science and Business Media {LLC}},
volume = {1},
number = {1},
author = {Arne Schleunitz and Vitaliy A Guzenko and Martin Messerschmidt and Hakan Atasoy and Robert Kirchner and Helmut Schift},
title = {Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration ({TASTE}) of polymers},
journal = {Nano Convergence}
}
doi = {10.1186/s40580-014-0007-5},
url = {https://doi.org/10.1186%2Fs40580-014-0007-5},
year = 2014,
month = {feb},
publisher = {Springer Science and Business Media {LLC}},
volume = {1},
number = {1},
author = {Arne Schleunitz and Vitaliy A Guzenko and Martin Messerschmidt and Hakan Atasoy and Robert Kirchner and Helmut Schift},
title = {Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration ({TASTE}) of polymers},
journal = {Nano Convergence}
}
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