cfaed Publications
Bio-inspired 3D funnel structures made by grayscale electron-beam patterning and selective topography equilibration
Reference
R. Kirchner, V.A. Guzenko, M. Rohn, E. Sonntag, M. Mühlberger, I. Bergmair, H. Schift, "Bio-inspired 3D funnel structures made by grayscale electron-beam patterning and selective topography equilibration", In Microelectronic Engineering, Elsevier BV, vol. 141, pp. 107–111, Jun 2015. [doi]
Bibtex
@article{Kirchner_2015,
doi = {10.1016/j.mee.2015.02.014},
url = {https://doi.org/10.1016%2Fj.mee.2015.02.014},
year = 2015,
month = {jun},
publisher = {Elsevier {BV}},
volume = {141},
pages = {107--111},
author = {R. Kirchner and V.A. Guzenko and M. Rohn and E. Sonntag and M. Mühlberger and I. Bergmair and H. Schift},
title = {Bio-inspired 3D funnel structures made by grayscale electron-beam patterning and selective topography equilibration},
journal = {Microelectronic Engineering}
}
doi = {10.1016/j.mee.2015.02.014},
url = {https://doi.org/10.1016%2Fj.mee.2015.02.014},
year = 2015,
month = {jun},
publisher = {Elsevier {BV}},
volume = {141},
pages = {107--111},
author = {R. Kirchner and V.A. Guzenko and M. Rohn and E. Sonntag and M. Mühlberger and I. Bergmair and H. Schift},
title = {Bio-inspired 3D funnel structures made by grayscale electron-beam patterning and selective topography equilibration},
journal = {Microelectronic Engineering}
}
Downloads
No Downloads available for this publication
Permalink
https://cfaed.tu-dresden.de/publications?pubId=3290