cfaed Publications
Stamp-and-repeat UV-imprinting of spin-coated films: Pre-exposure and imprint defects
Reference
R. Kirchner, L. Nüske, A. Finn, B. Lu, W.-J. Fischer, "Stamp-and-repeat UV-imprinting of spin-coated films: Pre-exposure and imprint defects", In Microelectronic Engineering, Elsevier BV, vol. 97, pp. 117–121, Sep 2012. [doi]
Bibtex
@article{Kirchner_2012,
doi = {10.1016/j.mee.2012.03.037},
url = {https://doi.org/10.1016%2Fj.mee.2012.03.037},
year = 2012,
month = {sep},
publisher = {Elsevier {BV}},
volume = {97},
pages = {117--121},
author = {R. Kirchner and L. Nüske and A. Finn and B. Lu and W.-J. Fischer},
title = {Stamp-and-repeat {UV}-imprinting of spin-coated films: Pre-exposure and imprint defects},
journal = {Microelectronic Engineering}
}
doi = {10.1016/j.mee.2012.03.037},
url = {https://doi.org/10.1016%2Fj.mee.2012.03.037},
year = 2012,
month = {sep},
publisher = {Elsevier {BV}},
volume = {97},
pages = {117--121},
author = {R. Kirchner and L. Nüske and A. Finn and B. Lu and W.-J. Fischer},
title = {Stamp-and-repeat {UV}-imprinting of spin-coated films: Pre-exposure and imprint defects},
journal = {Microelectronic Engineering}
}
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