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Degradation of Perfluorotrichlorosilane Antisticking Layers: The Impact on Mold Cleaning, Ultraviolet-Nanoimprinting, and Bonded Ultraviolet-Nanoimprint Molds
Reference
Robert Kirchner, Lichao Teng, Bo Lu, Barbara Adolphi, Wolf-Joachim Fischer, "Degradation of Perfluorotrichlorosilane Antisticking Layers: The Impact on Mold Cleaning, Ultraviolet-Nanoimprinting, and Bonded Ultraviolet-Nanoimprint Molds", In Japanese Journal of Applied Physics, IOP Publishing, vol. 50, no. 6, pp. 06GK13, Jun 2011. [doi]
Bibtex
@article{Kirchner_2011,
doi = {10.1143/jjap.50.06gk13},
url = {https://doi.org/10.1143%2Fjjap.50.06gk13},
year = 2011,
month = {jun},
publisher = {{IOP} Publishing},
volume = {50},
number = {6},
pages = {06GK13},
author = {Robert Kirchner and Lichao Teng and Bo Lu and Barbara Adolphi and Wolf-Joachim Fischer},
title = {Degradation of Perfluorotrichlorosilane Antisticking Layers: The Impact on Mold Cleaning, Ultraviolet-Nanoimprinting, and Bonded Ultraviolet-Nanoimprint Molds},
journal = {Japanese Journal of Applied Physics}
}
doi = {10.1143/jjap.50.06gk13},
url = {https://doi.org/10.1143%2Fjjap.50.06gk13},
year = 2011,
month = {jun},
publisher = {{IOP} Publishing},
volume = {50},
number = {6},
pages = {06GK13},
author = {Robert Kirchner and Lichao Teng and Bo Lu and Barbara Adolphi and Wolf-Joachim Fischer},
title = {Degradation of Perfluorotrichlorosilane Antisticking Layers: The Impact on Mold Cleaning, Ultraviolet-Nanoimprinting, and Bonded Ultraviolet-Nanoimprint Molds},
journal = {Japanese Journal of Applied Physics}
}
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