cfaed Publications

The ascent of high resolution and high volume 3D replication

Reference

R. Kirchner, H. Schift, "The ascent of high resolution and high volume 3D replication", In Microelectronic Engineering, Elsevier BV, vol. 141, pp. 243–244, Jun 2015. [doi]

Bibtex

@article{Kirchner_2015,
doi = {10.1016/j.mee.2015.04.082},
url = {https://doi.org/10.1016%2Fj.mee.2015.04.082},
year = 2015,
month = {jun},
publisher = {Elsevier {BV}},
volume = {141},
pages = {243--244},
author = {R. Kirchner and H. Schift},
title = {The ascent of high resolution and high volume 3D replication},
journal = {Microelectronic Engineering}
}

Downloads

No Downloads available for this publication

Permalink

https://cfaed.tu-dresden.de/publications?pubId=3308


Go back to publications list