cfaed Publications
The ascent of high resolution and high volume 3D replication
Reference
R. Kirchner, H. Schift, "The ascent of high resolution and high volume 3D replication", In Microelectronic Engineering, Elsevier BV, vol. 141, pp. 243–244, Jun 2015. [doi]
Bibtex
@article{Kirchner_2015,
doi = {10.1016/j.mee.2015.04.082},
url = {https://doi.org/10.1016%2Fj.mee.2015.04.082},
year = 2015,
month = {jun},
publisher = {Elsevier {BV}},
volume = {141},
pages = {243--244},
author = {R. Kirchner and H. Schift},
title = {The ascent of high resolution and high volume 3D replication},
journal = {Microelectronic Engineering}
}
doi = {10.1016/j.mee.2015.04.082},
url = {https://doi.org/10.1016%2Fj.mee.2015.04.082},
year = 2015,
month = {jun},
publisher = {Elsevier {BV}},
volume = {141},
pages = {243--244},
author = {R. Kirchner and H. Schift},
title = {The ascent of high resolution and high volume 3D replication},
journal = {Microelectronic Engineering}
}
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