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Single-digit 6-nm multilevel patterns by electron beam grayscale lithography

Reference

Robert Kirchner, Vitaliy A. Guzenko, Helmut Schift, "Single-digit 6-nm multilevel patterns by electron beam grayscale lithography", In Advanced Optical Technologies, Walter de Gruyter GmbH, vol. 8, no. 3-4, pp. 175–180, Apr 2019. [doi]

Bibtex

@article{Kirchner_2019,
doi = {10.1515/aot-2019-0016},
url = {https://doi.org/10.1515%2Faot-2019-0016},
year = 2019,
month = {apr},
publisher = {Walter de Gruyter {GmbH}},
volume = {8},
number = {3-4},
pages = {175--180},
author = {Robert Kirchner and Vitaliy A. Guzenko and Helmut Schift},
title = {Single-digit 6-nm multilevel patterns by electron beam grayscale lithography},
journal = {Advanced Optical Technologies}
}

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