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Selective surface smoothening of 3D micro-optical elements
Reference
Helmut Schift, Nachiappan Chidambaram, Mirco Altana, Robert Kirchner, "Selective surface smoothening of 3D micro-optical elements", SPIE Proceedings (Christopher Bencher and Joy Y. Cheng), SPIE, Mar 2017. [doi]
Bibtex
@inproceedings{Schift_2017,
doi = {10.1117/12.2256358},
url = {https://doi.org/10.1117%2F12.2256358},
year = 2017,
month = {mar},
publisher = ,
author = {Helmut Schift and Nachiappan Chidambaram and Mirco Altana and Robert Kirchner},
editor = {Christopher Bencher and Joy Y. Cheng},
title = {Selective surface smoothening of 3D micro-optical elements},
booktitle = {{SPIE} Proceedings}
}
doi = {10.1117/12.2256358},
url = {https://doi.org/10.1117%2F12.2256358},
year = 2017,
month = {mar},
publisher = ,
author = {Helmut Schift and Nachiappan Chidambaram and Mirco Altana and Robert Kirchner},
editor = {Christopher Bencher and Joy Y. Cheng},
title = {Selective surface smoothening of 3D micro-optical elements},
booktitle = {{SPIE} Proceedings}
}
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