cfaed Publications
Direct Nanoimprinting for Micro- and Nanosystems
Reference
Robert Kirchner, Jonathan Derix, Andreas Nocke, Ren'e Landgraf, "Direct Nanoimprinting for Micro- and Nanosystems", Chapter in Bio and Nano Packaging Techniques for Electron Devices, Springer Berlin Heidelberg, pp. 209–242, 2012. [doi]
Bibtex
@incollection{Kirchner_2012,
doi = {10.1007/978-3-642-28522-6_10},
url = {https://doi.org/10.1007%2F978-3-642-28522-6_10},
year = 2012,
publisher = {Springer Berlin Heidelberg},
pages = {209--242},
author = {Robert Kirchner and Jonathan Derix and Andreas Nocke and Ren{\'{e}} Landgraf},
title = {Direct Nanoimprinting for Micro- and Nanosystems},
booktitle = {Bio and Nano Packaging Techniques for Electron Devices}
}
doi = {10.1007/978-3-642-28522-6_10},
url = {https://doi.org/10.1007%2F978-3-642-28522-6_10},
year = 2012,
publisher = {Springer Berlin Heidelberg},
pages = {209--242},
author = {Robert Kirchner and Jonathan Derix and Andreas Nocke and Ren{\'{e}} Landgraf},
title = {Direct Nanoimprinting for Micro- and Nanosystems},
booktitle = {Bio and Nano Packaging Techniques for Electron Devices}
}
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