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Dry release of MEMS origami using thin Al2O3 films for facet-based device integration
Reference
J. Zhang, J. Reif, C. Strobel, P. Chava, A. Erbe, A. Voigt, T. Mikolajick, R. Kirchner, "Dry release of MEMS origami using thin Al2O3 films for facet-based device integration", In Micro and Nano Engineering, Elsevier BV, vol. 19, pp. 100179, Jun 2023. [doi]
Bibtex
@article{Zhang_2023,
doi = {10.1016/j.mne.2023.100179},
url = {https://doi.org/10.1016%2Fj.mne.2023.100179},
year = 2023,
month = {jun},
publisher = {Elsevier {BV}},
volume = {19},
pages = {100179},
author = {J. Zhang and J. Reif and C. Strobel and P. Chava and A. Erbe and A. Voigt and T. Mikolajick and R. Kirchner},
title = {Dry release of {MEMS} origami using thin Al2O3 films for facet-based device integration},
journal = {Micro and Nano Engineering}
}
doi = {10.1016/j.mne.2023.100179},
url = {https://doi.org/10.1016%2Fj.mne.2023.100179},
year = 2023,
month = {jun},
publisher = {Elsevier {BV}},
volume = {19},
pages = {100179},
author = {J. Zhang and J. Reif and C. Strobel and P. Chava and A. Erbe and A. Voigt and T. Mikolajick and R. Kirchner},
title = {Dry release of {MEMS} origami using thin Al2O3 films for facet-based device integration},
journal = {Micro and Nano Engineering}
}
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