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Lateral Extensions to Nanowires for Controlling Nickel Silicidation Kinetics: Improving Contact Uniformity of Nanoelectronic Devices
Reference
Maik Simon, Ryo Mizuta, Ye Fan, Alexander Tahn, Darius Pohl, Jens Trommer, Stephan Hofmann, Thomas Mikolajick, Walter M. Weber, "Lateral Extensions to Nanowires for Controlling Nickel Silicidation Kinetics: Improving Contact Uniformity of Nanoelectronic Devices", In ACS Applied Nano Materials, American Chemical Society (ACS), vol. 4, no. 5, pp. 4371–4378, Apr 2021. [doi]
Bibtex
@article{Simon_2021,
doi = {10.1021/acsanm.0c03072},
url = {https://doi.org/10.1021%2Facsanm.0c03072},
year = 2021,
month = {apr},
publisher = {American Chemical Society ({ACS})},
volume = {4},
number = {5},
pages = {4371--4378},
author = {Maik Simon and Ryo Mizuta and Ye Fan and Alexander Tahn and Darius Pohl and Jens Trommer and Stephan Hofmann and Thomas Mikolajick and Walter M. Weber},
title = {Lateral Extensions to Nanowires for Controlling Nickel Silicidation Kinetics: Improving Contact Uniformity of Nanoelectronic Devices},
journal = {{ACS} Applied Nano Materials}
}
doi = {10.1021/acsanm.0c03072},
url = {https://doi.org/10.1021%2Facsanm.0c03072},
year = 2021,
month = {apr},
publisher = {American Chemical Society ({ACS})},
volume = {4},
number = {5},
pages = {4371--4378},
author = {Maik Simon and Ryo Mizuta and Ye Fan and Alexander Tahn and Darius Pohl and Jens Trommer and Stephan Hofmann and Thomas Mikolajick and Walter M. Weber},
title = {Lateral Extensions to Nanowires for Controlling Nickel Silicidation Kinetics: Improving Contact Uniformity of Nanoelectronic Devices},
journal = {{ACS} Applied Nano Materials}
}
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