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Flash-Lamp-Enhanced Atomic Layer Deposition of Thin Films
Reference
Thomas Henke, Martin Knaut, Christoph Hossbach, Marion Geidel, Lars Rebohle, Matthias Albert, Wolfgang Skorupa, Johann W Bartha, "Flash-Lamp-Enhanced Atomic Layer Deposition of Thin Films", In ECS Transactions, The Electrochemical Society, vol. 64, no. 9, pp. 167–189, 2014. [doi]
Bibtex
@article{henke2014flash,
title={Flash-Lamp-Enhanced Atomic Layer Deposition of Thin Films},
author={Henke, Thomas and Knaut, Martin and Hossbach, Christoph and Geidel, Marion and Rebohle, Lars and Albert, Matthias and Skorupa, Wolfgang and Bartha, Johann W},
journal={ECS Transactions},
volume={64},
number={9},
pages={167--189},
year={2014},
publisher={The Electrochemical Society},
doi={10.1149/2.0301507jss}
}
title={Flash-Lamp-Enhanced Atomic Layer Deposition of Thin Films},
author={Henke, Thomas and Knaut, Martin and Hossbach, Christoph and Geidel, Marion and Rebohle, Lars and Albert, Matthias and Skorupa, Wolfgang and Bartha, Johann W},
journal={ECS Transactions},
volume={64},
number={9},
pages={167--189},
year={2014},
publisher={The Electrochemical Society},
doi={10.1149/2.0301507jss}
}
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