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Flash-Enhanced Atomic Layer Deposition: Basics, Opportunities, Review, and Principal Studies on the Flash-Enhanced Growth of Thin Films

Reference

Thomas Henke, Martin Knaut, Christoph Hossbach, Marion Geidel, Lars Rebohle, Matthias Albert, Wolfgang Skorupa, Johann W Bartha, "Flash-Enhanced Atomic Layer Deposition: Basics, Opportunities, Review, and Principal Studies on the Flash-Enhanced Growth of Thin Films" , In ECS Journal of Solid State Science and Technology, The Electrochemical Society, vol. 4, no. 7, pp. P277–P287, 2015.

Bibtex

@article{henke2015flash,
title={Flash-Enhanced Atomic Layer Deposition: Basics, Opportunities, Review, and Principal Studies on the Flash-Enhanced Growth of Thin Films},
author={Henke, Thomas and Knaut, Martin and Hossbach, Christoph and Geidel, Marion and Rebohle, Lars and Albert, Matthias and Skorupa, Wolfgang and Bartha, Johann W},
journal={ECS Journal of Solid State Science and Technology},
volume={4},
number={7},
pages={P277--P287},
year={2015},
publisher={The Electrochemical Society}
}

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