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Non-Destructive Imaging of Organosilicate Glass (OSG) Thin Films at Low Voltage With the EsB Detector
Reference
Aránzazu Garitagoitia Cid, Elham Moayedi, Rüdiger Rosenkranz, André Clausner, Khashayar Pakbaz, Ehrenfried Zschech, "Non-Destructive Imaging of Organosilicate Glass (OSG) Thin Films at Low Voltage With the EsB Detector" , In IEEE Transactions on Device and Materials Reliability, Institute of Electrical and Electronics Engineers (IEEE), vol. 16, no. 4, pp. 461–464, Dec 2016. [doi]
Bibtex
@article{GaritagoitiaCid2016,
doi = {10.1109/tdmr.2016.2628166},
url = {https://doi.org/10.1109%2Ftdmr.2016.2628166},
year = {2016},
month = {dec},
publisher = {Institute of Electrical and Electronics Engineers ({IEEE})},
volume = {16},
number = {4},
pages = {461--464},
author = {Aránzazu Garitagoitia Cid and Elham Moayedi and Rüdiger Rosenkranz and André Clausner and Khashayar Pakbaz and Ehrenfried Zschech},
title = {Non-Destructive Imaging of Organosilicate Glass ({OSG}) Thin Films at Low Voltage With the {EsB} Detector},
journal = {{IEEE} Transactions on Device and Materials Reliability}
doi = {10.1109/tdmr.2016.2628166},
url = {https://doi.org/10.1109%2Ftdmr.2016.2628166},
year = {2016},
month = {dec},
publisher = {Institute of Electrical and Electronics Engineers ({IEEE})},
volume = {16},
number = {4},
pages = {461--464},
author = {Aránzazu Garitagoitia Cid and Elham Moayedi and Rüdiger Rosenkranz and André Clausner and Khashayar Pakbaz and Ehrenfried Zschech},
title = {Non-Destructive Imaging of Organosilicate Glass ({OSG}) Thin Films at Low Voltage With the {EsB} Detector},
journal = {{IEEE} Transactions on Device and Materials Reliability}
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