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Raman based stress analysis of the active areas of a piezoresistive MEMS force sensor—Experimental setup, data processing, and comparison to numerically obtained results

Reference

P. Meszmer, K. Hiller, RD Rodriguez, E. Sheremet, DRT Zahn, M. Hietschold, B. Wunderle, "Raman based stress analysis of the active areas of a piezoresistive MEMS force sensor—Experimental setup, data processing, and comparison to numerically obtained results" , In Proceeding: Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2016 17th International Conference on, pp. 1–11, 2016.

Bibtex

@inproceedings{meszmer2016raman,
title={Raman based stress analysis of the active areas of a piezoresistive MEMS force sensor—Experimental setup, data processing, and comparison to numerically obtained results},
author={Meszmer, P and Hiller, K and Rodriguez, RD and Sheremet, E and Zahn, DRT and Hietschold, M and Wunderle, B},
booktitle={Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2016 17th International Conference on},
pages={1--11},
year={2016},
organization={IEEE}
}

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