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Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy
Reference
Peter Meszmer, Raul D. Rodriguez, Evgeniya Sheremet, Dietrich R.T. Zahn, Bernhard Wunderle, "Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy", In Microelectronics Reliability, Elsevier BV, vol. 79, pp. 104–110, Dec 2017. [doi]
Bibtex
@article{Meszmer_2017,
doi = {10.1016/j.microrel.2017.10.010},
url = {https://doi.org/10.1016%2Fj.microrel.2017.10.010},
year = 2017,
month = {dec},
publisher = {Elsevier {BV}},
volume = {79},
pages = {104--110},
author = {Peter Meszmer and Raul D. Rodriguez and Evgeniya Sheremet and Dietrich R.T. Zahn and Bernhard Wunderle},
title = {Stress imaging in structural challenging {MEMS} with high sensitivity using micro-Raman spectroscopy},
journal = {Microelectronics Reliability}
}
doi = {10.1016/j.microrel.2017.10.010},
url = {https://doi.org/10.1016%2Fj.microrel.2017.10.010},
year = 2017,
month = {dec},
publisher = {Elsevier {BV}},
volume = {79},
pages = {104--110},
author = {Peter Meszmer and Raul D. Rodriguez and Evgeniya Sheremet and Dietrich R.T. Zahn and Bernhard Wunderle},
title = {Stress imaging in structural challenging {MEMS} with high sensitivity using micro-Raman spectroscopy},
journal = {Microelectronics Reliability}
}
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