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Influence of sputtering pressure on the nanostructure and the X-ray reflectivity of iridium coatings
Reference
A.-C. Probst, M. Stollenwerk, F. Emmerich, A. Büttner, S. Zeising, J. Stadtmüller, F. Riethmüller, V. Stehlíková, M. Wen, L. Proserpio, C. Damm, B. Rellinghaus, T. Döhring, "Influence of sputtering pressure on the nanostructure and the X-ray reflectivity of iridium coatings", In Surface and Coatings Technology, Elsevier BV, vol. 343, pp. 101–107, Jun 2018. [doi]
Bibtex
@article{Probst_2018,
doi = {10.1016/j.surfcoat.2017.10.062},
url = {https://doi.org/10.1016%2Fj.surfcoat.2017.10.062},
year = 2018,
month = {jun},
publisher = {Elsevier {BV}},
volume = {343},
pages = {101--107},
author = {A.-C. Probst and M. Stollenwerk and F. Emmerich and A. Büttner and S. Zeising and J. Stadtmüller and F. Riethmüller and V. Stehl{\'{\i}}kov{\'{a}} and M. Wen and L. Proserpio and C. Damm and B. Rellinghaus and T. Döhring},
title = {Influence of sputtering pressure on the nanostructure and the X-ray reflectivity of iridium coatings},
journal = {Surface and Coatings Technology}
}
doi = {10.1016/j.surfcoat.2017.10.062},
url = {https://doi.org/10.1016%2Fj.surfcoat.2017.10.062},
year = 2018,
month = {jun},
publisher = {Elsevier {BV}},
volume = {343},
pages = {101--107},
author = {A.-C. Probst and M. Stollenwerk and F. Emmerich and A. Büttner and S. Zeising and J. Stadtmüller and F. Riethmüller and V. Stehl{\'{\i}}kov{\'{a}} and M. Wen and L. Proserpio and C. Damm and B. Rellinghaus and T. Döhring},
title = {Influence of sputtering pressure on the nanostructure and the X-ray reflectivity of iridium coatings},
journal = {Surface and Coatings Technology}
}
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