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Low-thermal budget flash light annealing for Al2O3surface passivation

Reference

Daniel K. Simon, Thomas Henke, Paul M. Jordan, Franz P. G. Fengler, Thomas Mikolajick, Johann W. Bartha, Ingo Dirnstorfer, "Low-thermal budget flash light annealing for Al2O3surface passivation" , In physica status solidi (RRL) - Rapid Research Letters, Wiley, vol. 9, no. 11, pp. 631–635, Oct 2015. [doi]

Bibtex

@article{Simon_2015,
doi = {10.1002/pssr.201510306},
url = {https://doi.org/10.1002%2Fpssr.201510306},
year = 2015,
month = {oct},
publisher = {Wiley},
volume = {9},
number = {11},
pages = {631--635},
author = {Daniel K. Simon and Thomas Henke and Paul M. Jordan and Franz P. G. Fengler and Thomas Mikolajick and Johann W. Bartha and Ingo Dirnstorfer},
title = {Low-thermal budget flash light annealing for Al2O3surface passivation},
journal = {physica status solidi ({RRL}) - Rapid Research Letters}
}

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