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Structural and dielectric properties of sputtered SrxZr (1- x) Oy
Reference
Matthias Grube, Dominik Martin, Walter M Weber, Thomas Mikolajick, Henning Riechert, "Structural and dielectric properties of sputtered SrxZr (1- x) Oy", In Journal of Applied Physics, AIP Publishing, vol. 113, no. 22, pp. 224107, 2013.
Bibtex
@article{grube2013structural,
title={Structural and dielectric properties of sputtered SrxZr (1- x) Oy},
author={Grube, Matthias and Martin, Dominik and Weber, Walter M and Mikolajick, Thomas and Riechert, Henning},
journal={Journal of Applied Physics},
volume={113},
number={22},
pages={224107},
year={2013},
publisher={AIP Publishing}
}
title={Structural and dielectric properties of sputtered SrxZr (1- x) Oy},
author={Grube, Matthias and Martin, Dominik and Weber, Walter M and Mikolajick, Thomas and Riechert, Henning},
journal={Journal of Applied Physics},
volume={113},
number={22},
pages={224107},
year={2013},
publisher={AIP Publishing}
}
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