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A Study of Gallium FIB induced Silicon Amorphization using TEM, APT and BCA Simulation

Reference

Jin Huang, Markus Loeffler, Uwe Muehle, Wolfhard Moeller, Hans Mulders, Laurens Kwakman, Ehrenfried Zschech, "A Study of Gallium FIB induced Silicon Amorphization using TEM, APT and BCA Simulation" , In Microscopy and Microanalysis, Cambridge University Press (CUP), vol. 21, no. S3, pp. 1839–1840, Aug 2015. [doi]

Bibtex

@article{Huang_2015,
doi = {10.1017/s1431927615009976},
url = {https://doi.org/10.1017%2Fs1431927615009976},
year = 2015,
month = {aug},
publisher = {Cambridge University Press ({CUP})},
volume = {21},
number = {S3},
pages = {1839--1840},
author = {Jin Huang and Markus Loeffler and Uwe Muehle and Wolfhard Moeller and Hans Mulders and Laurens Kwakman and Ehrenfried Zschech},
title = {A Study of Gallium {FIB} induced Silicon Amorphization using {TEM}, {APT} and {BCA} Simulation},
journal = {Microscopy and Microanalysis}
}

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