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High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps
Reference
Nachiappan Chidambaram, Robert Kirchner, Mirco Altana, Helmut Schift, "High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps", In Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, American Vacuum Society, vol. 34, no. 6, pp. 06K401, Nov 2016. [doi]
Bibtex
@article{Chidambaram_2016,
doi = {10.1116/1.4961250},
url = {https://doi.org/10.1116%2F1.4961250},
year = 2016,
month = {nov},
publisher = {American Vacuum Society},
volume = {34},
number = {6},
pages = {06K401},
author = {Nachiappan Chidambaram and Robert Kirchner and Mirco Altana and Helmut Schift},
title = {High fidelity 3D thermal nanoimprint with {UV} curable polydimethyl siloxane stamps},
journal = {Journal of Vacuum Science {\&} Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena}
}
doi = {10.1116/1.4961250},
url = {https://doi.org/10.1116%2F1.4961250},
year = 2016,
month = {nov},
publisher = {American Vacuum Society},
volume = {34},
number = {6},
pages = {06K401},
author = {Nachiappan Chidambaram and Robert Kirchner and Mirco Altana and Helmut Schift},
title = {High fidelity 3D thermal nanoimprint with {UV} curable polydimethyl siloxane stamps},
journal = {Journal of Vacuum Science {\&} Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena}
}
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