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Geometrical properties of multilayer nano-imprint-lithography molds for optical applications
Reference
Andreas Finn, Ren'e Hensel, Falk Hagemann, Robert Kirchner, Andreas Jahn, Wolf-Joachim Fischer, "Geometrical properties of multilayer nano-imprint-lithography molds for optical applications", In Microelectronic Engineering, Elsevier BV, vol. 98, pp. 284–287, Oct 2012. [doi]
Bibtex
@article{Finn_2012,
doi = {10.1016/j.mee.2012.04.022},
url = {https://doi.org/10.1016%2Fj.mee.2012.04.022},
year = 2012,
month = {oct},
publisher = {Elsevier {BV}},
volume = {98},
pages = {284--287},
author = {Andreas Finn and Ren{\'{e}} Hensel and Falk Hagemann and Robert Kirchner and Andreas Jahn and Wolf-Joachim Fischer},
title = {Geometrical properties of multilayer nano-imprint-lithography molds for optical applications},
journal = {Microelectronic Engineering}
}
doi = {10.1016/j.mee.2012.04.022},
url = {https://doi.org/10.1016%2Fj.mee.2012.04.022},
year = 2012,
month = {oct},
publisher = {Elsevier {BV}},
volume = {98},
pages = {284--287},
author = {Andreas Finn and Ren{\'{e}} Hensel and Falk Hagemann and Robert Kirchner and Andreas Jahn and Wolf-Joachim Fischer},
title = {Geometrical properties of multilayer nano-imprint-lithography molds for optical applications},
journal = {Microelectronic Engineering}
}
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