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How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses
Reference
Robert Kirchner, Nachiappan Chidambaram, Mirco Altana, Helmut Schift, "How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses", In Proceeding: Laser 3D Manufacturing IV (Bo Gu and Henry Helvajian and Alberto Piqu'e and Corey M. Dunsky and Jian Liu), SPIE, Feb 2017. [doi]
Bibtex
@inproceedings{Kirchner_2017,
doi = {10.1117/12.2258090},
url = {https://doi.org/10.1117%2F12.2258090},
year = 2017,
month = {feb},
publisher = ,
author = {Robert Kirchner and Nachiappan Chidambaram and Mirco Altana and Helmut Schift},
editor = {Bo Gu and Henry Helvajian and Alberto Piqu{\'{e}} and Corey M. Dunsky and Jian Liu},
title = {How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses},
booktitle = {Laser 3D Manufacturing {IV}}
}
doi = {10.1117/12.2258090},
url = {https://doi.org/10.1117%2F12.2258090},
year = 2017,
month = {feb},
publisher = ,
author = {Robert Kirchner and Nachiappan Chidambaram and Mirco Altana and Helmut Schift},
editor = {Bo Gu and Henry Helvajian and Alberto Piqu{\'{e}} and Corey M. Dunsky and Jian Liu},
title = {How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses},
booktitle = {Laser 3D Manufacturing {IV}}
}
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