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Effect of nanoimprint on the elastic modulus of PMMA: Comparison between standard and ultrafast thermal NIL
Reference
Michele Pianigiani, Robert Kirchner, Enrico Sovernigo, Alessandro Pozzato, Massimo Tormen, Helmut Schift, "Effect of nanoimprint on the elastic modulus of PMMA: Comparison between standard and ultrafast thermal NIL", In Microelectronic Engineering, Elsevier BV, vol. 155, pp. 85–91, Apr 2016. [doi]
Bibtex
@article{Pianigiani_2016,
doi = {10.1016/j.mee.2016.03.019},
url = {https://doi.org/10.1016%2Fj.mee.2016.03.019},
year = 2016,
month = {apr},
publisher = {Elsevier {BV}},
volume = {155},
pages = {85--91},
author = {Michele Pianigiani and Robert Kirchner and Enrico Sovernigo and Alessandro Pozzato and Massimo Tormen and Helmut Schift},
title = {Effect of nanoimprint on the elastic modulus of {PMMA}: Comparison between standard and ultrafast thermal {NIL}},
journal = {Microelectronic Engineering}
}
doi = {10.1016/j.mee.2016.03.019},
url = {https://doi.org/10.1016%2Fj.mee.2016.03.019},
year = 2016,
month = {apr},
publisher = {Elsevier {BV}},
volume = {155},
pages = {85--91},
author = {Michele Pianigiani and Robert Kirchner and Enrico Sovernigo and Alessandro Pozzato and Massimo Tormen and Helmut Schift},
title = {Effect of nanoimprint on the elastic modulus of {PMMA}: Comparison between standard and ultrafast thermal {NIL}},
journal = {Microelectronic Engineering}
}
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