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UV-nanoimprinting using non-transparent molds and non-transparent substrates
Reference
R. Kirchner, A. Finn, L. Teng, M. Ploetner, A. Jahn, L. Nueske, W.-J. Fischer, "UV-nanoimprinting using non-transparent molds and non-transparent substrates", In Microelectronic Engineering, Elsevier BV, vol. 88, no. 8, pp. 2004–2008, Aug 2011. [doi]
Bibtex
@article{Kirchner_2011,
doi = {10.1016/j.mee.2011.01.066},
url = {https://doi.org/10.1016%2Fj.mee.2011.01.066},
year = 2011,
month = {aug},
publisher = {Elsevier {BV}},
volume = {88},
number = {8},
pages = {2004--2008},
author = {R. Kirchner and A. Finn and L. Teng and M. Ploetner and A. Jahn and L. Nueske and W.-J. Fischer},
title = {{UV}-nanoimprinting using non-transparent molds and non-transparent substrates},
journal = {Microelectronic Engineering}
}
doi = {10.1016/j.mee.2011.01.066},
url = {https://doi.org/10.1016%2Fj.mee.2011.01.066},
year = 2011,
month = {aug},
publisher = {Elsevier {BV}},
volume = {88},
number = {8},
pages = {2004--2008},
author = {R. Kirchner and A. Finn and L. Teng and M. Ploetner and A. Jahn and L. Nueske and W.-J. Fischer},
title = {{UV}-nanoimprinting using non-transparent molds and non-transparent substrates},
journal = {Microelectronic Engineering}
}
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