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Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid
Reference
Robert Kirchner, Volker Neumann, Felix Winkler, Carsten Strobel, Sandra Völkel, Andr'e Hiess, Dimitrios Kazazis, Ulrich Künzelmann, Johann Wolfgang Bartha, "Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid", In Small, Wiley, vol. 16, no. 43, pp. 2002290, Oct 2020. [doi]
Bibtex
@article{Kirchner_2020,
doi = {10.1002/smll.202002290},
url = {https://doi.org/10.1002%2Fsmll.202002290},
year = 2020,
month = {oct},
publisher = {Wiley},
volume = {16},
number = {43},
pages = {2002290},
author = {Robert Kirchner and Volker Neumann and Felix Winkler and Carsten Strobel and Sandra Völkel and Andr{\'{e}} Hiess and Dimitrios Kazazis and Ulrich Künzelmann and Johann Wolfgang Bartha},
title = {Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid},
journal = {Small}
}
doi = {10.1002/smll.202002290},
url = {https://doi.org/10.1002%2Fsmll.202002290},
year = 2020,
month = {oct},
publisher = {Wiley},
volume = {16},
number = {43},
pages = {2002290},
author = {Robert Kirchner and Volker Neumann and Felix Winkler and Carsten Strobel and Sandra Völkel and Andr{\'{e}} Hiess and Dimitrios Kazazis and Ulrich Künzelmann and Johann Wolfgang Bartha},
title = {Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid},
journal = {Small}
}
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