cfaed Publications
Depth-profiling of vertical material contrast after VUV exposure for contact-free polishing of 3D polymer micro-optics
Reference
Robert Kirchner, Roel Hoekstra, Nachiappan Chidambaram, Helmut Schift, "Depth-profiling of vertical material contrast after VUV exposure for contact-free polishing of 3D polymer micro-optics", In Proceeding: 33rd European Mask and Lithography Conference (Uwe F.W. Behringer and Jo Finders), SPIE, Sep 2017. [doi]
Bibtex
@inproceedings{Kirchner_2017,
doi = {10.1117/12.2279712},
url = {https://doi.org/10.1117%2F12.2279712},
year = 2017,
month = {sep},
publisher = ,
author = {Robert Kirchner and Roel Hoekstra and Nachiappan Chidambaram and Helmut Schift},
editor = {Uwe F.W. Behringer and Jo Finders},
title = {Depth-profiling of vertical material contrast after {VUV} exposure for contact-free polishing of 3D polymer micro-optics},
booktitle = {33rd European Mask and Lithography Conference}
}
doi = {10.1117/12.2279712},
url = {https://doi.org/10.1117%2F12.2279712},
year = 2017,
month = {sep},
publisher = ,
author = {Robert Kirchner and Roel Hoekstra and Nachiappan Chidambaram and Helmut Schift},
editor = {Uwe F.W. Behringer and Jo Finders},
title = {Depth-profiling of vertical material contrast after {VUV} exposure for contact-free polishing of 3D polymer micro-optics},
booktitle = {33rd European Mask and Lithography Conference}
}
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