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TCAD-enabled Machine Learning - An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication
Reference
Paul Jungmann, Jeffrey B. Johnson, Eduardo C. Silva, William Taylor, Abdul Hanan Khan, Akash Kumar, "TCAD-enabled Machine Learning - An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication", In IEEE Transactions on Semiconductor Manufacturing, Institute of Electrical and Electronics Engineers (IEEE), pp. 1–1, 2023. [doi]
Bibtex
@article{Jungmann_2023,
doi = {10.1109/tsm.2023.3240033},
url = {https://doi.org/10.1109%2Ftsm.2023.3240033},
year = 2023,
publisher = {Institute of Electrical and Electronics Engineers ({IEEE})},
pages = {1--1},
author = {Paul Jungmann and Jeffrey B. Johnson and Eduardo C. Silva and William Taylor and Abdul Hanan Khan and Akash Kumar},
title = {{TCAD}-enabled Machine Learning - An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication},
journal = {{IEEE} Transactions on Semiconductor Manufacturing}
}
doi = {10.1109/tsm.2023.3240033},
url = {https://doi.org/10.1109%2Ftsm.2023.3240033},
year = 2023,
publisher = {Institute of Electrical and Electronics Engineers ({IEEE})},
pages = {1--1},
author = {Paul Jungmann and Jeffrey B. Johnson and Eduardo C. Silva and William Taylor and Abdul Hanan Khan and Akash Kumar},
title = {{TCAD}-enabled Machine Learning - An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication},
journal = {{IEEE} Transactions on Semiconductor Manufacturing}
}
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